ICMATE in Padova has various apparatus for the deposition of thin films by three distinct PVD systems (Physical Vapor Deposition) for Magnetron Sputtering: a) a multi-confocal magnetron, b) a multi-magnetron multi-layer, which may both work in either mode DC- both RF- Magnetron Sputtering (DC and RF-MS), and c) an innovative system High Power Impulse Magnetron Sputtering (HIPIMS).

Main advantages of HIPIMS are:

1. the ability to greatly improve the adhesion by means of a pretreatment of the substrate surface prior to deposition;
2. the deposition of ultra dense film, with highly controlled microstructures, with an increased ratio hardness / Young's modulus than the conventional PVD coatings;
3. particularly smooth surface morphology;
4. the possibility of deposition with uniform properties even on substrates of complex shape.

HiPIMS vs. DC-MS: a) cross section of AlTiN film; b) top view of multi-layer W/Mo

The HIPIMS is employed in the development of protective coatings for components that must operate in critical conditions, including:

• Coatings of Mo and Mo / Mo -N having low coefficient of friction and high wear resistance for an internal combustion engine;
  

  

  MoN via HiPIMS on commercial pistons (AlSi alloy) for internal combustion engine
• Coatings based on AlTiN resistant to tribo-corrosion at high temperatures (e.g. gas turbine blades).
  

  AlTiN via HiPIMS on γ-TiAlalloy: effect of etching on morphology.
• Coating of refractories metals for nuclear applications
  

  

  a) T91 test specimens coated by HiPIMS with AlTIN for molten lead tests; b) tiles for fusion reactors